KOKUSAI DD-853V-8BL PYRO Furnace for sale --- (sold out)

 

GST Pyro Specification(S/N : 1C853S0161)
No.	Discription	1
1.	Manufacturer	KE
2.	Model	DD-853V / J2
3.	Serial No.	1C853S0161
4.	Vintage	99.10
5.	Process Name / EQP No.	PYRO
6.	Equipment Status	CND WAREHOUSE
7.	System Controller
1	Main Controller	CX-3002B
2	Mecha Controller	CX-1223
3	Temp Controller	CQ-1600
4	Over Temp Protect	DN-150A
5	MFC / APC Controller	CX-3202
6	Sequence Controller	CX-1314(OMRON)
7	Burning Controller	CX-1317
8.	General Configuration
1	Heater Type(Model)	D4EX03513
2	Heating Zone	4 ZONE
3	Signal Tower	3COLOR(R,G,Y)
4	Heater Status	EXIST
5	WTR Fork.	1+4
6	Fork Variable Pitch	EXIST
7	Fork Wafer Sensor	EXIST
8	Cassette Slot Qt'y	26Pc
9	Stage Qt'y	23
10	Load Type (SMIF / I/O)	I/O
11	Aligner	Flatzone / 26Pc
12	Gas Detector	H2(1ea) / HCL(1ea)
13	Hard Gas Pattern	(Front, Rear)
14	CX-3002P (Monitor)	Rear
15	Pump Unit	NONE
16	Torch Unit	EXIST (LAMP TYPE)
17	Heating Jacket(Tape Heater)	NONE
18	Gas Tubing	IGS  (Fujikin)
9.	Process Gasses
1	Process Gas 1	N2
2	Process Gas 2	O2
3	Process Gas 3	H2
4	Process Gas 4	HCL
5	Process Gas 5
10.	MFC
1	MFC 1	Aera N2 30SLM
2	MFC 2	Aera O2 20SLM
3	MFC 3	Aera O2 2SLM
4	MFC 4	Aera H2 20SLM
5	MFC 5	Aera HCL 0.5SLM
6	MFC 6
11.	Boat / Pedestal
1	Boat Slot	172
2	Qty of Production Wafers	150
3	Boat rotation	NONE
12.	Temp Control
1	T/C(Spike, Over temp)	O.K
2	Flange Temp Controller	EXIST
13.	Exhaust Parts
1	Gas Cooler	EXIST
2	Exhaust Line	1" Teflon
3	APC Valve	Stec (PCU-3000 / EC-5202), (50mmH2O)
14.	Power
1	Voltage (Heater)	1Φ208V (50KVA)
2	Voltage (Controller Main)	1Φ208V (3KVA)
3	Voltage (Clean Unit)	1Φ208V (6KVA)
15.	Missing / Fail Parts
1
2
3
4
16.	ETC
1
2

 

GST Pyro Specification(T2DC3-11445-3)
No.	Discription	1
1.	Manufacturer	KE
2.	Model	DD-853V / J2
3.	Serial No.	T2DC3-11445-3
4.	Vintage	2000.10
5.	Process Name / EQP No.	PYRO
6.	Equipment Status	CND WAREHOUSE
7.	System Controller
1	Main Controller	CX-3002B
2	Mecha Controller	CX-1223
3	Temp Controller	CQ-1600
4	Over Temp Protect	DN-150A
5	MFC / APC Controller	CX-3202
6	Sequence Controller	CX-1314(OMRON)
7	Burning Controller	CX-1317
8.	General Configuration
1	Heater Type(Model)
2	Heating Zone	4 ZONE
3	Signal Tower	3COLOR(R,G,Y)
4	Heater Status	EXIST
5	WTR Fork.	1+4
6	Fork Variable Pitch	EXIST
7	Fork Wafer Sensor	EXIST
8	Cassette Slot Qt'y	26Pc
9	Stage Qt'y	23
10	Load Type (SMIF / I/O)	I/O
11	Aligner	Flatzone / 26Pc
12	Gas Detector	H2(1ea) / HCL(1ea)
13	Hard Gas Pattern	(Front, Rear)
14	CX-3002P (Monitor)	Rear
15	Pump Unit	NONE
16	Torch Unit	EXIST (LAMP TYPE)
17	Heating Jacket(Tape Heater)	NONE
18	Gas Tubing	Conventional
9.	Process Gasses
1	Process Gas 1	N2
2	Process Gas 2	O2
3	Process Gas 3	H2
4	Process Gas 4	HCL
5	Process Gas 5
10.	MFC
1	MFC 1	N2 30SLM
2	MFC 2	O2 20SLM
3	MFC 3	O2 2SLM
4	MFC 4	H2 20SLM
5	MFC 5	HCL 0.5SLM
6	MFC 6
11.	Boat / Pedestal
1	Boat Slot	172
2	Qty of Production Wafers	150
3	Boat rotation	NONE
12.	Temp Control
1	T/C(Spike, Over temp)	O.K
2	Flange Temp Controller	EXIST
13.	Exhaust Parts
1	Gas Cooler	EXIST
2	Exhaust Line	1" Teflon
3	APC Valve	Sentry1510, Vertical (50mmH2O)
14.	Power
1	Voltage (Heater)	1Φ208V (50KVA)
2	Voltage (Controller Main)	1Φ208V (3KVA)
3	Voltage (Clean Unit)	1Φ208V (6KVA)
15.	Missing / Fail Parts
1
2
3
4
16.	ETC
1
2