KOKUSAI DD-823V H2 ANNEAL Vertical Furnace for sale --- (sold out)

KOKUSAI Diffusion furnace gas flow chart

We can modify the KE diffusion furnace gas flow chart software(CX3000).

We are also making available the hardware gas panel.

Diffusion furnace equipment support(KOKUSAI, TEL)

Our company support a variety of semiconductor diffusion furnace equipment.

1. Used equipment for sale.
2. Equipment modifications, process modifications.
3. Equipment dismantling, relocation.
4. Kokusai all equipment can be modified valve interlock(PLC Type, PLD Type).
5. Equipment HDD copy / backup support.
6. The various accessories and parts support.
7. Mechanism part & cable making.
8. Equipment troubleshooting support.

Mechanism part's making

TEL ALPHA-808 SC TEOS Furnace for sale --- (sold out)

TEL ALPHA-808SE-Z NITRIDE Furnace for sale --- (sold out)

KOKUSAI DD-853V-8BL PYRO Furnace for sale --- (sold out)

 

GST Pyro Specification(S/N : 1C853S0161)
No.	Discription	1
1.	Manufacturer	KE
2.	Model	DD-853V / J2
3.	Serial No.	1C853S0161
4.	Vintage	99.10
5.	Process Name / EQP No.	PYRO
6.	Equipment Status	CND WAREHOUSE
7.	System Controller
1	Main Controller	CX-3002B
2	Mecha Controller	CX-1223
3	Temp Controller	CQ-1600
4	Over Temp Protect	DN-150A
5	MFC / APC Controller	CX-3202
6	Sequence Controller	CX-1314(OMRON)
7	Burning Controller	CX-1317
8.	General Configuration
1	Heater Type(Model)	D4EX03513
2	Heating Zone	4 ZONE
3	Signal Tower	3COLOR(R,G,Y)
4	Heater Status	EXIST
5	WTR Fork.	1+4
6	Fork Variable Pitch	EXIST
7	Fork Wafer Sensor	EXIST
8	Cassette Slot Qt'y	26Pc
9	Stage Qt'y	23
10	Load Type (SMIF / I/O)	I/O
11	Aligner	Flatzone / 26Pc
12	Gas Detector	H2(1ea) / HCL(1ea)
13	Hard Gas Pattern	(Front, Rear)
14	CX-3002P (Monitor)	Rear
15	Pump Unit	NONE
16	Torch Unit	EXIST (LAMP TYPE)
17	Heating Jacket(Tape Heater)	NONE
18	Gas Tubing	IGS  (Fujikin)
9.	Process Gasses
1	Process Gas 1	N2
2	Process Gas 2	O2
3	Process Gas 3	H2
4	Process Gas 4	HCL
5	Process Gas 5
10.	MFC
1	MFC 1	Aera N2 30SLM
2	MFC 2	Aera O2 20SLM
3	MFC 3	Aera O2 2SLM
4	MFC 4	Aera H2 20SLM
5	MFC 5	Aera HCL 0.5SLM
6	MFC 6
11.	Boat / Pedestal
1	Boat Slot	172
2	Qty of Production Wafers	150
3	Boat rotation	NONE
12.	Temp Control
1	T/C(Spike, Over temp)	O.K
2	Flange Temp Controller	EXIST
13.	Exhaust Parts
1	Gas Cooler	EXIST
2	Exhaust Line	1" Teflon
3	APC Valve	Stec (PCU-3000 / EC-5202), (50mmH2O)
14.	Power
1	Voltage (Heater)	1Φ208V (50KVA)
2	Voltage (Controller Main)	1Φ208V (3KVA)
3	Voltage (Clean Unit)	1Φ208V (6KVA)
15.	Missing / Fail Parts
1
2
3
4
16.	ETC
1
2

 

GST Pyro Specification(T2DC3-11445-3)
No.	Discription	1
1.	Manufacturer	KE
2.	Model	DD-853V / J2
3.	Serial No.	T2DC3-11445-3
4.	Vintage	2000.10
5.	Process Name / EQP No.	PYRO
6.	Equipment Status	CND WAREHOUSE
7.	System Controller
1	Main Controller	CX-3002B
2	Mecha Controller	CX-1223
3	Temp Controller	CQ-1600
4	Over Temp Protect	DN-150A
5	MFC / APC Controller	CX-3202
6	Sequence Controller	CX-1314(OMRON)
7	Burning Controller	CX-1317
8.	General Configuration
1	Heater Type(Model)
2	Heating Zone	4 ZONE
3	Signal Tower	3COLOR(R,G,Y)
4	Heater Status	EXIST
5	WTR Fork.	1+4
6	Fork Variable Pitch	EXIST
7	Fork Wafer Sensor	EXIST
8	Cassette Slot Qt'y	26Pc
9	Stage Qt'y	23
10	Load Type (SMIF / I/O)	I/O
11	Aligner	Flatzone / 26Pc
12	Gas Detector	H2(1ea) / HCL(1ea)
13	Hard Gas Pattern	(Front, Rear)
14	CX-3002P (Monitor)	Rear
15	Pump Unit	NONE
16	Torch Unit	EXIST (LAMP TYPE)
17	Heating Jacket(Tape Heater)	NONE
18	Gas Tubing	Conventional
9.	Process Gasses
1	Process Gas 1	N2
2	Process Gas 2	O2
3	Process Gas 3	H2
4	Process Gas 4	HCL
5	Process Gas 5
10.	MFC
1	MFC 1	N2 30SLM
2	MFC 2	O2 20SLM
3	MFC 3	O2 2SLM
4	MFC 4	H2 20SLM
5	MFC 5	HCL 0.5SLM
6	MFC 6
11.	Boat / Pedestal
1	Boat Slot	172
2	Qty of Production Wafers	150
3	Boat rotation	NONE
12.	Temp Control
1	T/C(Spike, Over temp)	O.K
2	Flange Temp Controller	EXIST
13.	Exhaust Parts
1	Gas Cooler	EXIST
2	Exhaust Line	1" Teflon
3	APC Valve	Sentry1510, Vertical (50mmH2O)
14.	Power
1	Voltage (Heater)	1Φ208V (50KVA)
2	Voltage (Controller Main)	1Φ208V (3KVA)
3	Voltage (Clean Unit)	1Φ208V (6KVA)
15.	Missing / Fail Parts
1
2
3
4
16.	ETC
1
2